{"title":"A novel infrared microbolometer in standard CMOS-MEMS process","authors":"Meng-Lieh Sheu, Ji-Yi Chen, M. Li, L. Tsao","doi":"10.1109/ISBB.2014.6820898","DOIUrl":null,"url":null,"abstract":"A novel infrared micro-bolometer realized in CMOS with MEMS post process is proposed. The micro-bolometer is constructed as a metal micro-cavity to enhance its absorptivity of incident infrared energy. Three testkeys with different cavity structure are presented. The measured sensitivity of the testkeys, in the temperature range of 5-75°C, are 9.56 Ω/°C, 8.78 Ω/°C and 9.89 Ω/°C, respectively. The micro-bolometer occupies a chip area of 439×370 μm<sup>2</sup> in 0.18 μm process. It is suitable for application on smart biomedical sensor.","PeriodicalId":265886,"journal":{"name":"2014 IEEE International Symposium on Bioelectronics and Bioinformatics (IEEE ISBB 2014)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE International Symposium on Bioelectronics and Bioinformatics (IEEE ISBB 2014)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISBB.2014.6820898","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
A novel infrared micro-bolometer realized in CMOS with MEMS post process is proposed. The micro-bolometer is constructed as a metal micro-cavity to enhance its absorptivity of incident infrared energy. Three testkeys with different cavity structure are presented. The measured sensitivity of the testkeys, in the temperature range of 5-75°C, are 9.56 Ω/°C, 8.78 Ω/°C and 9.89 Ω/°C, respectively. The micro-bolometer occupies a chip area of 439×370 μm2 in 0.18 μm process. It is suitable for application on smart biomedical sensor.
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