{"title":"A fully-packaged silicon micromachined piezoresistive accelerometer","authors":"K. Walsh, H. Henderson, G. D. De Brabander","doi":"10.1109/SECON.1992.202430","DOIUrl":null,"url":null,"abstract":"The design and development of a second-generation miniature piezoresistive micromachined accelerometer are presented. Bulk micromachining etching techniques were utilized in the fabrication of the single-crystalline silicon device. The sensor is essentially its own package, consisting of three carefully aligned","PeriodicalId":230446,"journal":{"name":"Proceedings IEEE Southeastcon '92","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Southeastcon '92","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SECON.1992.202430","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
The design and development of a second-generation miniature piezoresistive micromachined accelerometer are presented. Bulk micromachining etching techniques were utilized in the fabrication of the single-crystalline silicon device. The sensor is essentially its own package, consisting of three carefully aligned
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