{"title":"In situ Raman spectroscopic characterization of compound semiconductor free carrier concentration","authors":"J. Maslar, C. Wang, D. Oakley","doi":"10.1109/LEOSST.2000.869719","DOIUrl":null,"url":null,"abstract":"Recently, developments in detectors, filters, and laser technology now make Raman spectroscopy more attractive as an in situ probe. The objective of this work is to develop and evaluate Raman spectroscopy as an in situ, spatially resolved probe of compound semiconductor electrical properties for use in process monitoring and control.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LEOSST.2000.869719","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Recently, developments in detectors, filters, and laser technology now make Raman spectroscopy more attractive as an in situ probe. The objective of this work is to develop and evaluate Raman spectroscopy as an in situ, spatially resolved probe of compound semiconductor electrical properties for use in process monitoring and control.
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