A means to study reliability based defects in fully processed devices utilizing zero-field spin dependent transport

C. Cochrane, P. Lenahan
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引用次数: 4

Abstract

Electron paramagnetic resonance (EPR) and electrically detected magnetic resonance (EDMR) are extremely useful techniques that are capable of defect detection in semiconductor structures and fully processed devices, respectively. The complexity of conventional EPR and EDMR spectrometers involves utilization of strong (>3000 G) highly uniform magnetic fields (B0) and high frequency (typically 9 GHz) oscillating magnetic fields (B1) or higher. These components are typically expensive and heavy. In this study, we directly demonstrate that, in the absence of both an oscillating magnetic field and a large static magnetic field, spin dependent recombination (SDR) and spin dependent tunneling (SDT) can be detected at zero magnetic field. In this zero-field detection scheme, hyperfine interactions can be detected which allow for the physical identification of the defects responsible for SDR and SDT. However, we sacrifice the evaluation of a resonance parameter, the g-value. We observe the zero-field phenomenon in multiple solid state electronic components including MOSFETs, BJTs, diodes, and capacitors suggesting its usefulness for semiconducting manufacturers to incorporate simple automated low-field/zero-field EDMR spectrometers into wafer fabrication/probing equipment to study the defects in solid-state electronics during fabrication. Because only very low fields are required, low field EDMR can be performed easily and inexpensively.
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一种利用零场自旋相关输运研究全加工器件可靠性缺陷的方法
电子顺磁共振(EPR)和电检测磁共振(EDMR)是非常有用的技术,分别能够在半导体结构和全加工器件中检测缺陷。传统EPR和EDMR光谱仪的复杂性涉及使用强(>3000 G)高度均匀的磁场(B0)和高频(通常为9 GHz)振荡磁场(B1)或更高。这些部件通常既昂贵又笨重。在这项研究中,我们直接证明了在没有振荡磁场和大的静态磁场的情况下,可以在零磁场下检测到自旋依赖复合(SDR)和自旋依赖隧道(SDT)。在这种零场检测方案中,可以检测到超精细的相互作用,从而可以对导致SDR和SDT的缺陷进行物理识别。然而,我们牺牲了对一个共振参数g值的评估。我们在包括mosfet、bjt、二极管和电容器在内的多个固态电子元件中观察到零场现象,这表明半导体制造商可以将简单的自动化低场/零场EDMR光谱仪集成到晶圆制造/探测设备中,以研究固态电子元件在制造过程中的缺陷。由于只需要非常低的场,因此低场EDMR可以轻松且廉价地进行。
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