Single-transfer method for fabrication of linear array of graphene-based nanodevices

Abstract

In this paper, we report a novel fabrication method to make linear array of graphene based nanodevices on a single chip by one single-transfer process. The method enables transferring of a number of graphene flakes on a substrate with predefined electrodes. This method enables efficient fabrication of multiple graphene based nanodevices on single chip. Chemical vapor deposition grown graphene was patterned into M × N array, and the array can be transferred to a single chip by the transfer process. The electrical measurement results show that the electrical characteristics of the nanodevices are highly consistent and stable. Furthermore, the single-transfer method can be applied in fabricating various kinds of nanodevices. The method would have great potential to realize large-scale production of graphene based biosensors.