High response time micro scale thermo-couple for biological applications

F. Gillot, A. Tixier-Mita, F. Morin, H. Fujita
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引用次数: 1

Abstract

We describe the design and manufacture of a thin film thermo-couple (TFTC) which is intended for real time observations of temperature-dependant phenomena of biological systems. The TFTC design aims at shortening its response time. The TFTC manufacturing process combines platinum, silica and chromium sputtering with reactive ion etching (RIE) on glass substrate. Our device consists of a platinum wire (the heater) near a micro TFTC sensor. This sensor consists in two wires made of platinum and chromium. These wires are in contact on a 2times2 mum area. Our micro TFTC shows a simulated response time of 0.35 ms when used in air (for DeltaTap55 K), and 1.5 ms when used in water (for DeltaTap41 K)
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用于生物应用的高响应时间微型热电偶
我们描述了一种薄膜热电偶(TFTC)的设计和制造,该薄膜热电偶用于实时观察生物系统的温度依赖现象。TFTC设计旨在缩短其响应时间。TFTC制造工艺将铂、二氧化硅和铬溅射与反应离子蚀刻(RIE)结合在玻璃衬底上。我们的设备由靠近微型TFTC传感器的铂丝(加热器)组成。这种传感器由两根由铂和铬制成的导线组成。这些电线在2x2ma区域上接触。我们的微型TFTC在空气中使用时(deltatap55k)的模拟响应时间为0.35 ms,在水中使用时(deltatap41k)的模拟响应时间为1.5 ms。
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