Optimization of Manufacturing of Operational Amplifier Manufactured by Using Field-effect Heterotransistor to Decrease Their Dimensions

E. Pankratov
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Abstract

In this paper we introduce an approach to decrease dimensions of operational amplifier based on field-effect heterotransistors. Dimensions of the elements will be decreased due to manufacture heterostructure with specific structure, doping of required areas of the heterostruc-ture by diffusion or ion implantation and optimization of annealing of dopant and/or radiation defects.
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场效应异质晶体管运算放大器尺寸减小的工艺优化
本文介绍了一种基于场效应异质晶体管的运算放大器降维方法。由于制造具有特定结构的异质结构,通过扩散或离子注入掺杂异质结构所需区域以及优化掺杂和/或辐射缺陷的退火,元件的尺寸将减小。
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