J. Weber, M. Link, R. Primig, D. Pitzer, M. Schreiter
{"title":"High Frequency Viscosity Sensing with FBARs","authors":"J. Weber, M. Link, R. Primig, D. Pitzer, M. Schreiter","doi":"10.1109/FREQ.2006.275362","DOIUrl":null,"url":null,"abstract":"Film bulk acoustic resonators operating in thickness shear mode at a frequency of 720 MHz are used to characterize liquids with different viscosities. Their advantage over QCM devices are higher packaging density, CMOS-compatibility as well as lower production costs. Sensor response corresponds with theoretical models in the low viscosity regime but deviates strongly for higher viscosities. This behavior is analyzed as well as an assessment of the FBAR as a viscosity sensor is made","PeriodicalId":445945,"journal":{"name":"2006 IEEE International Frequency Control Symposium and Exposition","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE International Frequency Control Symposium and Exposition","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2006.275362","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
Film bulk acoustic resonators operating in thickness shear mode at a frequency of 720 MHz are used to characterize liquids with different viscosities. Their advantage over QCM devices are higher packaging density, CMOS-compatibility as well as lower production costs. Sensor response corresponds with theoretical models in the low viscosity regime but deviates strongly for higher viscosities. This behavior is analyzed as well as an assessment of the FBAR as a viscosity sensor is made
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
