Engineered epsilon-near-zero metafilm with Ag-SiNx multilayer structure

Abstract

In this summary, we report an experimental demonstration of a low-loss multilayer-based ENZ metafilm. The demonstrated ENZ metafilm consists of alternating layers of Ag and SiN. The optical properties, such as the effective plasma frequency and damping coefficients, of the demonstrated metafilm were controlled by changing the volume fraction of the metal layer. The measured effective permittivity values from an ellipsometry analysis show good agreement with the calculated results using a simple Maxwell-Garnett effective medium theory.