Experimental researches of a 3-DOF parallel micromanipulator driven by linear ultrasonic motors

2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Pub Date : 2015-10-01 DOI:10.1109/SPAWDA.2015.7364496

Yun Wang, Z. Yao, Ranran Geng, Ling-chao Meng

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引用次数: 1

Abstract

A 3-DOF micromanipulator driven by linear ultrasonic motors is proposed in this paper. Compared with the traditional micromanipulator based on static deformation of piezoelectric ceramics (high displacement resolution, micro-size motion range), this micromanipulator owns motion range in millimeter size (2 mm) while having high displacement resolution (50 nm). First of all, working principle of the micromanipulator is described. Parallel mechanism is adopted in this micromanipulator, linear ultrasonic motors are taken as the sliding pair to actuate the micromanipulator and flexible hinge are introduced as revolute pair. Then kinematics analysis of the micromanipulator is carried out. Finally, a series of experimental studies are illustrated in detail, steel balls and shrimp roe had been grasped and moved by this micromanipulator under telescope. The experimental results show that the micromanipulator can be applied to grab and move tiny particles. This micromanipulator has good performance and can be used in medical and biological engineering field.

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直线超声电机驱动三自由度并联微机械臂的实验研究

提出了一种由直线超声电机驱动的三自由度微机械臂。与传统基于压电陶瓷静态变形的微机械臂(高位移分辨率、微尺寸运动范围)相比，该微机械臂的运动范围为毫米级(2mm)，同时具有高位移分辨率(50 nm)。首先，介绍了微机械臂的工作原理。该微机械臂采用并联机构，以直线超声电机作为驱动微机械臂的滑动副，引入柔性铰链作为驱动微机械臂的转动副。然后对微机械臂进行运动学分析。最后详细说明了一系列的实验研究，在望远镜下用该微机械臂抓取和移动了钢球和虾籽。实验结果表明，该微机械臂可以实现微小颗粒的抓取和移动。该微机械臂具有良好的性能，可用于医学和生物工程领域。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)

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