Wei Xu, Beiqi Lijin, Mingzheng Duan, Xiaoyi Wang, Jeffry Wicaksana, A. Min, Moaaz Ahmed, Ruijin Wang, N. Fang, A. Bermak, Yi-Kuen Lee
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引用次数: 18
Abstract
In this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.
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