Fusion of AFM and SEM scans

Abstract

Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) are commonly used technologies for high resolution surface investigations. Combined AFM and SEM studies provide a thorough view of specimen topography and material properties, due to a large number of sophisticated imaging techniques. This work aims at providing a more meaningful representation of results from combined examinations, by applying methods of image fusion and visualization. Multiple application scenarios are discussed. According to the specification of requirements, three imaging procedures are presented in detail and applied to scans from a combined AFM and SEM study.