{"title":"A stiffness-defined silicon plane bending method to realize perfectly-curved surface formation for tunable parabolic mirrors","authors":"Trần Nam Bình, S. Morishita, M. Kubota, Y. Mita","doi":"10.1109/OMEMS.2012.6318802","DOIUrl":null,"url":null,"abstract":"The authors propose a universal method to form cylindrically-curved surfaces by dynamically bending in-plane a DRIE-etched flat vertical silicon plate with microactuator. The stiffness is designed position-dependent, thus allowing ideal curvature over large area.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2012.6318802","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The authors propose a universal method to form cylindrically-curved surfaces by dynamically bending in-plane a DRIE-etched flat vertical silicon plate with microactuator. The stiffness is designed position-dependent, thus allowing ideal curvature over large area.
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