{"title":"Fabrication technology of optical waveguides on glasses","authors":"N. L. Orlikov, L. Orlikov, S. Shandarov","doi":"10.1109/SIBCON.2007.371318","DOIUrl":null,"url":null,"abstract":"Fabrication technology of optoelectronic elements on glasses, as substitute of elements on crystals, is considered. A waveguide is prepared by formation of a film of lead oxide using standard thermovacuum sputtering equipment with the following diffusion at the atmospheric pressure.","PeriodicalId":184476,"journal":{"name":"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat","volume":"76 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SIBCON.2007.371318","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Fabrication technology of optoelectronic elements on glasses, as substitute of elements on crystals, is considered. A waveguide is prepared by formation of a film of lead oxide using standard thermovacuum sputtering equipment with the following diffusion at the atmospheric pressure.
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