{"title":"Design of a 2D High Precision Motion Stage","authors":"G. Hermann","doi":"10.1109/LINDI.2009.5258699","DOIUrl":null,"url":null,"abstract":"A small scale, high precision positioning table was developed to solve measurement problems originating from microtechnic. A construction with a single reference surface prefered and vacuum preloaded air bearing are used to enable smooth motion and eliminate stick slip. The nested tables are driven by ultrasonic piezomotors to enable submicron resolution, high speed and low heath generation. The nonlinearity of the piezomotors is corrected partly by the amplifier used, and partly by the control software. Laser interferometers measure both the displacement and the angular error. Mathematical evaluation of the measuring system’s error is described and its application in the control software is presented.","PeriodicalId":306564,"journal":{"name":"2009 2nd International Symposium on Logistics and Industrial Informatics","volume":"37 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-09-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 2nd International Symposium on Logistics and Industrial Informatics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LINDI.2009.5258699","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A small scale, high precision positioning table was developed to solve measurement problems originating from microtechnic. A construction with a single reference surface prefered and vacuum preloaded air bearing are used to enable smooth motion and eliminate stick slip. The nested tables are driven by ultrasonic piezomotors to enable submicron resolution, high speed and low heath generation. The nonlinearity of the piezomotors is corrected partly by the amplifier used, and partly by the control software. Laser interferometers measure both the displacement and the angular error. Mathematical evaluation of the measuring system’s error is described and its application in the control software is presented.
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