H. Tuinhout, N. Wils, P. Huiskamp, Eelco de Koning
{"title":"Design and evaluation of an integrated thin film resistor matching test structure","authors":"H. Tuinhout, N. Wils, P. Huiskamp, Eelco de Koning","doi":"10.1109/ICMTS.2015.7106127","DOIUrl":null,"url":null,"abstract":"A test structure is presented that combines two types of full Kelvin matched resistor pairs in a single 12 pad process control compatible test line. Based on these structures, matching results of SiCr resistors in a BiCMOS RF technology are discussed, demonstrating some of the frequently encountered challenges of interpreting subtle parametric mismatch fluctuation effects.","PeriodicalId":177627,"journal":{"name":"Proceedings of the 2015 International Conference on Microelectronic Test Structures","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2015 International Conference on Microelectronic Test Structures","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2015.7106127","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
A test structure is presented that combines two types of full Kelvin matched resistor pairs in a single 12 pad process control compatible test line. Based on these structures, matching results of SiCr resistors in a BiCMOS RF technology are discussed, demonstrating some of the frequently encountered challenges of interpreting subtle parametric mismatch fluctuation effects.
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