Optical near-field photocurrent spectroscopy as a new tool for analyzing optoelectronic devices

A. Richter, C. Lienau, J. Tomm, T. Elsaesser
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引用次数: 1

Abstract

Optical near-field spectroscopy and related methods display a rapid development as powerful new analytical tools for the investigation of optoelectronic devices such as, e.g., semiconductor lasers. Photocurrent spectroscopy, belonging to the traditional methods of semiconductor physics, gained an entirely new range of application by employing an optical near-field microscope as the optical excitation source. Thus near-field optical beam induced current (NOBIC) spectroscopy has been developed. It combines the spatial resolution of less than some 100 nm of electron beam based techniques such as electron beam induced current (EBIC) with the advantages of providing selective excitation of the laser structure if a tunable wavelength excitation source is used and being completely non-destructive. Here, a NOBIC study of different GaAs-AlGaAs high power diode laser array structures such as double quantum well (DQW) graded index separate confinement heterostructures as well as step index AlGaAs structures is presented.
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光学近场光电流光谱是分析光电器件的新工具
光学近场光谱学及其相关方法作为研究光电器件(如半导体激光器)的强有力的新分析工具,显示出快速的发展。光电流光谱作为半导体物理的传统方法,利用光学近场显微镜作为光激发源,获得了全新的应用范围。因此,近场光束感应电流(NOBIC)光谱学得到了发展。它结合了电子束诱导电流(EBIC)等基于电子束的技术的小于100 nm的空间分辨率,以及如果使用波长可调的激发源,则可以提供激光结构的选择性激发和完全无损的优点。本文对不同的GaAs-AlGaAs高功率二极管激光阵列结构,如双量子阱(DQW)梯度折射率分离约束异质结构和阶跃折射率AlGaAs结构进行了NOBIC研究。
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