{"title":"Teflon-seated one-lambda microvalves for PDMS chips","authors":"Y. Xie, Y. Wang, F. Azizi, C. Mastrangelo","doi":"10.1109/BIOCAS.2008.4696936","DOIUrl":null,"url":null,"abstract":"We have fabricated and tested minimum sized (25times25 mum2) pneumatic valves that can be easily integrated within two-level PDMS microfluidic chips. Minimum valve footprint is achieved through the reduction of the valve gap (0-3 mum) and the incorporation of an anti-stiction teflon valve seat that prevents the bonding of the valve diaphragm during chip assembly. The pneumatic teflon-seated valves can be actuated with a pressure differential of 25 PSI using conventional PDMS control valve hardware. The microvalve flow resistance of 3.5 PSImiddotsmiddotL-1 was estimated from flow visualization measurements The microvalves can switch flows up to 5 Hz frequencies.","PeriodicalId":415200,"journal":{"name":"2008 IEEE Biomedical Circuits and Systems Conference","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE Biomedical Circuits and Systems Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/BIOCAS.2008.4696936","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We have fabricated and tested minimum sized (25times25 mum2) pneumatic valves that can be easily integrated within two-level PDMS microfluidic chips. Minimum valve footprint is achieved through the reduction of the valve gap (0-3 mum) and the incorporation of an anti-stiction teflon valve seat that prevents the bonding of the valve diaphragm during chip assembly. The pneumatic teflon-seated valves can be actuated with a pressure differential of 25 PSI using conventional PDMS control valve hardware. The microvalve flow resistance of 3.5 PSImiddotsmiddotL-1 was estimated from flow visualization measurements The microvalves can switch flows up to 5 Hz frequencies.
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