Yankun Liu, W. Lou, Qingfang Shi, Mingru Guo, Peng Liu
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引用次数: 0
Abstract
With the development of nanotechnology and Micro-Electro-Mechanical System (MEMS) technology, micro-pores films are widely applied in the fabrication of important components of nano-devices and MEMS. It is found that micro-pores films have the effect on the separation of the two-phases and the fix of the phase interfaces, due to huge network structures and highly ordered distribution of pore structure. Based on the combined effects of the inertial impaction, the interception and the diffusion, PTFE membrane filter is adopted. Furthermore, we perform the simulation by the COMSOL Multiphysics, which reflects the filtering effect of the PTFE nano-film materials. Finally we study the simulation of the protective micro-particles in PTFE membrane materials.
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