首页 > 最新文献

2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)最新文献

英文 中文
The bonding of LiNbO3-silicon via BCB material 用BCB材料键合linbo3 -硅
Jinxin Cheng, Weiguo Liu, Huan Liu
Adhesive wafer bonding is a bonding approach using an intermediate layer for bonding (e.g. glass, polymers, resists, polyimides). This paper presents results on adhesive bonding using spin-on Benzocyclobutene(BCB) from Dow Chemicals. The advantages of using adhesive bonding for MEMS applications will be illustrated by presenting a technology of fabricating LiNbO3-on-Si substrates. By changing the rotational speed of spin coating and BCB thickness, bonding temperature, hold temperature, bonding pressure, and other parameters, we carried out a series of process optimization experiment. Finally the bonding shear strength was tested. The results show that LiNbO3 and silicon has a good bonding strength under the bonding conditions at 200°C. This process will allow us the hybrid integrated manufacturing of SAW devices.
胶粘剂晶圆键合是一种使用中间层进行键合的键合方法(例如,玻璃、聚合物、抗蚀剂、聚酰亚胺)。本文介绍了用陶氏化学公司的自旋苯并环丁烯(BCB)进行粘接的结果。通过介绍一种制造LiNbO3-on-Si衬底的技术,将说明在MEMS应用中使用粘合剂粘合的优点。通过改变旋涂速度和BCB厚度、键合温度、保温温度、键合压力等参数,进行了一系列工艺优化实验。最后进行了粘结抗剪强度测试。结果表明,在200℃的键合条件下,LiNbO3与硅具有良好的键合强度。这一过程将使我们能够混合集成制造SAW器件。
{"title":"The bonding of LiNbO3-silicon via BCB material","authors":"Jinxin Cheng, Weiguo Liu, Huan Liu","doi":"10.1109/3M-NANO.2012.6472990","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472990","url":null,"abstract":"Adhesive wafer bonding is a bonding approach using an intermediate layer for bonding (e.g. glass, polymers, resists, polyimides). This paper presents results on adhesive bonding using spin-on Benzocyclobutene(BCB) from Dow Chemicals. The advantages of using adhesive bonding for MEMS applications will be illustrated by presenting a technology of fabricating LiNbO3-on-Si substrates. By changing the rotational speed of spin coating and BCB thickness, bonding temperature, hold temperature, bonding pressure, and other parameters, we carried out a series of process optimization experiment. Finally the bonding shear strength was tested. The results show that LiNbO3 and silicon has a good bonding strength under the bonding conditions at 200°C. This process will allow us the hybrid integrated manufacturing of SAW devices.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115163895","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Virtual reality backend for operator controlled nanomanipulation 操作者控制纳米操作的虚拟现实后端
Bruno Sauvet, Nizar Ouarti, S. Haliyo, S. Régnier
Nanomanipulation is an important tool for recent developments in nanoscale production, characterization and analysis, both in material and life sciences. Its use is actually limited because of its complexity. Especially inside a scanning electron microscope, kinematic constraints, open-loop actuators and lack of natural visual access are barriers for its widespread use and require an operator specialized on a given set-up. The approach proposed here is to use a virtual model of such a manipulation set-up, synchronized in real-time with the real set-up, to overcome the difficulties for the operator to easily grasp and control his manipulation task. Moreover, such an approach would provide a virtual feedback to implement an overall closed loop control on the set-up.
纳米操作是材料科学和生命科学中纳米尺度生产、表征和分析的重要工具。由于它的复杂性,它的使用实际上是有限的。特别是在扫描电子显微镜中,运动学约束、开环驱动器和缺乏自然视觉访问是其广泛使用的障碍,需要专门的操作人员。本文提出的方法是使用这种操作装置的虚拟模型,与真实装置实时同步,以克服操作员容易掌握和控制其操作任务的困难。此外,这种方法将提供虚拟反馈,以实现对设置的整体闭环控制。
{"title":"Virtual reality backend for operator controlled nanomanipulation","authors":"Bruno Sauvet, Nizar Ouarti, S. Haliyo, S. Régnier","doi":"10.1109/3M-NANO.2012.6472955","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472955","url":null,"abstract":"Nanomanipulation is an important tool for recent developments in nanoscale production, characterization and analysis, both in material and life sciences. Its use is actually limited because of its complexity. Especially inside a scanning electron microscope, kinematic constraints, open-loop actuators and lack of natural visual access are barriers for its widespread use and require an operator specialized on a given set-up. The approach proposed here is to use a virtual model of such a manipulation set-up, synchronized in real-time with the real set-up, to overcome the difficulties for the operator to easily grasp and control his manipulation task. Moreover, such an approach would provide a virtual feedback to implement an overall closed loop control on the set-up.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125376593","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
CMOS-compatible silicon nanowire based field-effect pH sensor cmos兼容的基于硅纳米线的场效应pH传感器
A. Gao, P. Dai, N. Lu, Tie Li, Yuelin Wang
A field effect transistor (FET) sensor for pH detection was developed in this paper based on complementary metal oxide semiconductor (CMOS)-compatible semiconducting nanowires. Optical lithography and anisotropic self-stop etching were employed to guarantee low cost batch production for silicon nanowires. Under environment relevant for sensing experiments, the transfer curves of silicon nanowires (SiNW) FET were studied so as to understand the device sensing performance. With this nanofabricated pH sensor, the change in the hydrogen ion concentration of a solution can be detected by the corresponding change in current. Without surface modification of the nanosensor, its current showed nonlinear pH-dependence and the threshold voltage (Vth) shift of about 4 V has been attained over pH 5.0 to 9.0 ranges. The development of a nanoscale sensor offers the possibility of highly parallel labeling and detection of chemical and biological molecules with selective control of individual array elements in a single integrated chip.
基于互补金属氧化物半导体(CMOS)兼容的半导体纳米线,研制了一种用于pH检测的场效应晶体管(FET)传感器。采用光学光刻和各向异性自停止蚀刻技术保证了硅纳米线的低成本批量生产。在传感实验环境下,研究了硅纳米线场效应管的传递曲线,以了解器件的传感性能。利用这种纳米pH传感器,可以通过相应的电流变化来检测溶液中氢离子浓度的变化。在不进行表面修饰的情况下,纳米传感器的电流表现出非线性的pH依赖性,在pH 5.0 ~ 9.0的范围内,阈值电压(Vth)位移约为4 V。纳米级传感器的发展提供了高度平行标记和检测化学和生物分子的可能性,并在单个集成芯片中选择性地控制单个阵列元素。
{"title":"CMOS-compatible silicon nanowire based field-effect pH sensor","authors":"A. Gao, P. Dai, N. Lu, Tie Li, Yuelin Wang","doi":"10.1109/3M-NANO.2012.6472948","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472948","url":null,"abstract":"A field effect transistor (FET) sensor for pH detection was developed in this paper based on complementary metal oxide semiconductor (CMOS)-compatible semiconducting nanowires. Optical lithography and anisotropic self-stop etching were employed to guarantee low cost batch production for silicon nanowires. Under environment relevant for sensing experiments, the transfer curves of silicon nanowires (SiNW) FET were studied so as to understand the device sensing performance. With this nanofabricated pH sensor, the change in the hydrogen ion concentration of a solution can be detected by the corresponding change in current. Without surface modification of the nanosensor, its current showed nonlinear pH-dependence and the threshold voltage (Vth) shift of about 4 V has been attained over pH 5.0 to 9.0 ranges. The development of a nanoscale sensor offers the possibility of highly parallel labeling and detection of chemical and biological molecules with selective control of individual array elements in a single integrated chip.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116386879","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Development of a micro accelerometer based MOEMS 基于MOEMS的微加速度计的研制
Bo Zhang, W. Li
MEMS accelerometer sensors have been developed in decade years at various techniques such as piezoelectric, piezo-resistive, and micro capacitive etc. But the optical technology will bring the new activity and potential. In this paper, a accelerometer sensor based on the light transmission measurement and micro electromechanical system (MEMS) technology is proposed and simulated. Light power is coupled into the waveguide cantilever through the fiber. The intensity of comparison demodulation method is presented to analyze the relation between output signals and accelerometers. Theoretical analysis and simulation results are discussed.
MEMS加速度计传感器在近十年的时间里发展了各种技术,如压电、压阻和微电容等。但光学技术将带来新的活动和潜力。本文提出了一种基于光传输测量和微机电系统(MEMS)技术的加速度计传感器,并进行了仿真。光功率通过光纤耦合到波导悬臂中。为了分析输出信号与加速度计之间的关系,提出了比较强度解调方法。对理论分析和仿真结果进行了讨论。
{"title":"Development of a micro accelerometer based MOEMS","authors":"Bo Zhang, W. Li","doi":"10.1109/3M-NANO.2012.6472984","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472984","url":null,"abstract":"MEMS accelerometer sensors have been developed in decade years at various techniques such as piezoelectric, piezo-resistive, and micro capacitive etc. But the optical technology will bring the new activity and potential. In this paper, a accelerometer sensor based on the light transmission measurement and micro electromechanical system (MEMS) technology is proposed and simulated. Light power is coupled into the waveguide cantilever through the fiber. The intensity of comparison demodulation method is presented to analyze the relation between output signals and accelerometers. Theoretical analysis and simulation results are discussed.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124681877","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Single-bacterium resolution biosensors based on pristine graphenes 基于原始石墨烯的单细菌分辨率生物传感器
F. Rao, H. Al-Mumen, D. Ramos-Gonzalez, Lixin Dong, Wen Li
We investigated the sensing abilities of pristine graphene based nanosensors in response to the attachment of Escherichia coli (E. coli) to the graphene surfaces. Using pristine graphenes, instead of functionalized graphenes, helps us understand better the influence of E. coli cells on the transport properties of graphenes. The biosensors based on pristine few-layer graphenes showed a discriminable response to the attachment of an individual E. coli cell, indicating the sensing ability with single-bacterium resolution. Furthermore, higher sensitivities were achieved using pristine mono-layer graphenes and graphene microribbons as the sensing materials. The higher sensitivities can be attributed to the elimination of the interferences from inessential graphene layers and the quantum confinement in the graphene microribbon.
我们研究了原始石墨烯纳米传感器对大肠杆菌附着在石墨烯表面的传感能力。使用原始石墨烯,而不是功能化石墨烯,有助于我们更好地了解大肠杆菌细胞对石墨烯运输特性的影响。基于原始的几层石墨烯的生物传感器对单个大肠杆菌细胞的附着表现出可分辨的反应,表明具有单细菌分辨率的传感能力。此外,使用原始单层石墨烯和石墨烯微带作为传感材料获得了更高的灵敏度。更高的灵敏度可归因于消除了不必要的石墨烯层的干扰和石墨烯微带中的量子限制。
{"title":"Single-bacterium resolution biosensors based on pristine graphenes","authors":"F. Rao, H. Al-Mumen, D. Ramos-Gonzalez, Lixin Dong, Wen Li","doi":"10.1109/3M-NANO.2012.6472956","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472956","url":null,"abstract":"We investigated the sensing abilities of pristine graphene based nanosensors in response to the attachment of Escherichia coli (E. coli) to the graphene surfaces. Using pristine graphenes, instead of functionalized graphenes, helps us understand better the influence of E. coli cells on the transport properties of graphenes. The biosensors based on pristine few-layer graphenes showed a discriminable response to the attachment of an individual E. coli cell, indicating the sensing ability with single-bacterium resolution. Furthermore, higher sensitivities were achieved using pristine mono-layer graphenes and graphene microribbons as the sensing materials. The higher sensitivities can be attributed to the elimination of the interferences from inessential graphene layers and the quantum confinement in the graphene microribbon.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"85 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123618243","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Nanorobotic handling of few-layer graphene membranes using a combined AFM/SEM/FIB setup 使用AFM/SEM/FIB组合装置的纳米机器人处理少层石墨烯膜
S. Zimmermann, S. Fatikow
This paper presents a new experimental approach for pick and place handling of few-layer graphene nanomembranes with side length of 10 μm and below. In the as-received condition, the membranes are freely suspended on a grid which is covered with a lacey carbon film. Using focused ion beam cutting and a nanorobotic driven tungsten tip, selected membrane-fragments can be separated from the grid and transferred to any chosen substrate with high accuracy. As an example, one membrane is placed on a hole with a diameter of 5 μm on a Si/SiO2 sample. Subsequently, the membrane is fixed and mechanically characterized. The paper investigates the advantages, the opportunities and the limits of this technique in particular with regard to possible applications.
本文提出了一种边长在10 μm及以下的小层石墨烯纳米膜的取放处理新实验方法。在接收条件下,膜自由悬浮在网格上,网格上覆盖有花边碳膜。利用聚焦离子束切割和纳米机器人驱动的钨尖,选定的膜碎片可以从网格中分离出来,并以高精度转移到任何选定的基底上。作为一个例子,在Si/SiO2样品上放置一个直径为5 μm的孔。随后,对膜进行固定和机械表征。本文探讨了这种技术的优点、机会和局限性,特别是在可能的应用方面。
{"title":"Nanorobotic handling of few-layer graphene membranes using a combined AFM/SEM/FIB setup","authors":"S. Zimmermann, S. Fatikow","doi":"10.1109/3M-NANO.2012.6472934","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472934","url":null,"abstract":"This paper presents a new experimental approach for pick and place handling of few-layer graphene nanomembranes with side length of 10 μm and below. In the as-received condition, the membranes are freely suspended on a grid which is covered with a lacey carbon film. Using focused ion beam cutting and a nanorobotic driven tungsten tip, selected membrane-fragments can be separated from the grid and transferred to any chosen substrate with high accuracy. As an example, one membrane is placed on a hole with a diameter of 5 μm on a Si/SiO2 sample. Subsequently, the membrane is fixed and mechanically characterized. The paper investigates the advantages, the opportunities and the limits of this technique in particular with regard to possible applications.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121485563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Development of a compact nano manipulator based on an atomic force microscope: For monitoring using a scanning electron microscope or an inverted optical microscope 基于原子力显微镜的小型纳米机械臂的研制:用于扫描电子显微镜或倒置光学显微镜的监测
F. Iwata, M. Takahashi, H. Ko, M. Adachi
In this paper, we describe a novel nano manipulator based on an atomic force microscope (AFM). The body of the manipulator is enough compact to be operated inside the sample chamber of a scanning electron microscope (SEM). In order to realize the compact body, we employed a self-detection type cantilever for AFM observation. The cantilever includes strain resistance element, which can easily detect a deflection signal of the cantilever without other sensing devices such as optical lever systems. It is possible to observe the manipulation situation in the real time observation by using the SEM. The AFM manipulator is coupled with a haptic device for human interface. Thus, by using this system, the operator can move the AFM probe at any position on the surface with feeling the interaction force detected by the cantilever on the sample surface according to the cantilever deflection. As a performance of the system, biological samples were controllably manipulated under the SEM observation. Furthermore, in order to deal with biological samples in liquid condition, the manipulator can be coupled with an inverted optical microscope. By using the system, we successfully demonstrated manipulation of biological samples in liquid condition. Two AFM manipulators could be used for dissection of biological samples like a knife and fork.
本文描述了一种基于原子力显微镜(AFM)的新型纳米机械手。机械手的主体足够紧凑,可以在扫描电子显微镜(SEM)的样品室内操作。为了实现紧凑体,我们采用自检测型悬臂进行AFM观测。该悬臂梁包括应变电阻元件,该元件可以轻松地检测悬臂梁的挠度信号,而无需其他传感装置,如光学杠杆系统。利用扫描电镜可以实时观察操作情况。AFM机械臂与人机界面触觉装置相结合。因此,通过使用该系统,操作者可以在表面上的任何位置移动AFM探针,并根据悬臂梁挠度感受悬臂梁在样品表面上检测到的相互作用力。作为该系统的一个性能,生物样品在扫描电镜观察下被可控地操纵。此外,为了处理液体条件下的生物样品,机械手可以与倒置光学显微镜相结合。通过使用该系统,我们成功地演示了在液体条件下对生物样品的操作。两个AFM机械手可以像刀叉一样用于生物样品的解剖。
{"title":"Development of a compact nano manipulator based on an atomic force microscope: For monitoring using a scanning electron microscope or an inverted optical microscope","authors":"F. Iwata, M. Takahashi, H. Ko, M. Adachi","doi":"10.1109/3M-NANO.2012.6472981","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472981","url":null,"abstract":"In this paper, we describe a novel nano manipulator based on an atomic force microscope (AFM). The body of the manipulator is enough compact to be operated inside the sample chamber of a scanning electron microscope (SEM). In order to realize the compact body, we employed a self-detection type cantilever for AFM observation. The cantilever includes strain resistance element, which can easily detect a deflection signal of the cantilever without other sensing devices such as optical lever systems. It is possible to observe the manipulation situation in the real time observation by using the SEM. The AFM manipulator is coupled with a haptic device for human interface. Thus, by using this system, the operator can move the AFM probe at any position on the surface with feeling the interaction force detected by the cantilever on the sample surface according to the cantilever deflection. As a performance of the system, biological samples were controllably manipulated under the SEM observation. Furthermore, in order to deal with biological samples in liquid condition, the manipulator can be coupled with an inverted optical microscope. By using the system, we successfully demonstrated manipulation of biological samples in liquid condition. Two AFM manipulators could be used for dissection of biological samples like a knife and fork.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124233246","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Force calibration of a dual-probe nanotweezer using a mechanical lever 用机械杠杆对双探针纳米镊子进行力校正
Hui Xie, W. Rong, A. Wu, Chen Yang, Lining Sun
This paper presents a noncontact force calibration method in applications of the dual-probe nanotweezer. A 2 DOF mechanical lever has been developed to directly calibrate both the normal and lateral sensitivities of two optical levers used to independently measure normal and lateral forces applied on the nanotweezer. The mechanical lever is designed with a configuration of two mutually perpendicular levers, each consists of two flexible hinges, sharing a same rotational center, Each lever can convert the translation into a nanoscale rotation angle that provides an accurate conversion between the photodiode voltage output and deflective angle of a cantilever. During the calibration, a cantilever is mounted on the mechanical lever and attached on the rotational center of the flexible hinges. By making use of its nanomotion on the Z-axis and using an external motion on the barrier, this device can complete the local and full-range sensitivity calibrations of the optical levers without modifying the actual AFM or the cantilevers. Nonlinearities on both normal and lateral of the optical levers have been accurately compensated.
提出了一种在双探针纳米镊子中应用的非接触力标定方法。开发了一种2自由度机械杠杆,用于直接校准两个光学杠杆的法向和侧向灵敏度,这两个光学杠杆用于独立测量施加在纳米镊子上的法向和侧向力。机械杠杆设计为两个相互垂直的杠杆,每个杠杆由两个柔性铰链组成,共享同一个旋转中心,每个杠杆可以将平移转换为纳米级的旋转角度,从而在光电二极管电压输出和悬臂的偏转角度之间提供精确的转换。在校准过程中,悬臂安装在机械杠杆上,并附着在柔性铰链的旋转中心上。利用其在z轴上的纳米运动和屏障上的外部运动,该装置可以在不修改实际AFM或悬臂的情况下完成光学杠杆的局部和全范围灵敏度校准。光学杠杆的法向和侧向非线性都得到了精确的补偿。
{"title":"Force calibration of a dual-probe nanotweezer using a mechanical lever","authors":"Hui Xie, W. Rong, A. Wu, Chen Yang, Lining Sun","doi":"10.1109/3M-NANO.2012.6472971","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472971","url":null,"abstract":"This paper presents a noncontact force calibration method in applications of the dual-probe nanotweezer. A 2 DOF mechanical lever has been developed to directly calibrate both the normal and lateral sensitivities of two optical levers used to independently measure normal and lateral forces applied on the nanotweezer. The mechanical lever is designed with a configuration of two mutually perpendicular levers, each consists of two flexible hinges, sharing a same rotational center, Each lever can convert the translation into a nanoscale rotation angle that provides an accurate conversion between the photodiode voltage output and deflective angle of a cantilever. During the calibration, a cantilever is mounted on the mechanical lever and attached on the rotational center of the flexible hinges. By making use of its nanomotion on the Z-axis and using an external motion on the barrier, this device can complete the local and full-range sensitivity calibrations of the optical levers without modifying the actual AFM or the cantilevers. Nonlinearities on both normal and lateral of the optical levers have been accurately compensated.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"25 9","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134413294","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Continuous enucleation of bovine oocyte by microrobot with local flow distribution control 局部血流分布控制的微型机器人连续牛卵母细胞去核
Lin Feng, A. Ichikawa, F. Arai, M. Hagiwara
We present a continuous enucleation process of bovine oocytes on a microfluidic chip to achieve the continuous cutting of the oocytes and increasing the potential viability of the enucleated oocyte. By combining microfluidic chip and micororobotics, the flow in a channel can be actively controlled and we achieved successive operations of 1) loading oocyte, 2) control cutting volume and 3) removing nucleus. The magnetically actuated microrobot can control local fluid flow by changing its position like gate valve and control fluid force distributions in a microchip which govern oocyte movement in a chip. The optimally designed microchannel for enucleation enables continuous operation and cutting bovine oocyte with smooth manner by hydrodynamic force. The new system is propose here to show advantages by the means of the continuous operation on oocytes in a short term, cutting precision and great potentiality on continuous enucleation process for clone technology.
我们提出了一种牛卵母细胞在微流控芯片上的连续去核过程,以实现卵母细胞的连续切割和增加去核卵母细胞的潜在生存能力。将微流控芯片与微型机器人相结合,实现了通道内流动的主动控制,实现了1)加载卵母细胞、2)控制切割体积、3)去除细胞核的连续操作。磁驱动微型机器人可以像闸阀一样通过改变其位置来控制局部流体流动,并控制芯片内的流体力分布,从而控制芯片内卵母细胞的运动。优化设计的去核微通道,利用水动力使牛卵母细胞能够连续操作,切割平滑。该系统具有短时间内对卵母细胞进行连续操作,切割精度高,在克隆技术的连续去核过程中具有很大的潜力等优点。
{"title":"Continuous enucleation of bovine oocyte by microrobot with local flow distribution control","authors":"Lin Feng, A. Ichikawa, F. Arai, M. Hagiwara","doi":"10.1109/3M-NANO.2012.6472969","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472969","url":null,"abstract":"We present a continuous enucleation process of bovine oocytes on a microfluidic chip to achieve the continuous cutting of the oocytes and increasing the potential viability of the enucleated oocyte. By combining microfluidic chip and micororobotics, the flow in a channel can be actively controlled and we achieved successive operations of 1) loading oocyte, 2) control cutting volume and 3) removing nucleus. The magnetically actuated microrobot can control local fluid flow by changing its position like gate valve and control fluid force distributions in a microchip which govern oocyte movement in a chip. The optimally designed microchannel for enucleation enables continuous operation and cutting bovine oocyte with smooth manner by hydrodynamic force. The new system is propose here to show advantages by the means of the continuous operation on oocytes in a short term, cutting precision and great potentiality on continuous enucleation process for clone technology.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129322251","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Raman spectrum calculation and analysis of Xylitol 木糖醇的拉曼光谱计算与分析
G. Mo-ran, Cai Hongxing, L. Liwei, Zhang Yue, Shi Jing, Hu Xinyue, Ma Zhenfang, Zhang Xihe
Xylitol is an important substitute of sugar, it was widely used in medicine, chemical and food manufacture. In this work, xylitol geometry structure was optimized by density functional theory (DFT) method. Raman spectra was calculated based on Hartree-Fock (HF)/6-31G sets and DFT/6-31G sets, good agreements were obtained between the two theoretical and experimental results. Vibrational modes were assigned to all bands between 1000-3500cm-1 range. This work will establish a certain foundation to the study of the application and detection of xylitol.
木糖醇是一种重要的糖替代品,在医药、化工和食品生产中有着广泛的应用。利用密度泛函理论(DFT)对木糖醇的几何结构进行了优化。基于Hartree-Fock (HF)/6-31G集和DFT/6-31G集计算拉曼光谱,理论和实验结果吻合较好。在1000-3500cm-1范围内的所有波段都分配了振动模式。本工作将为木糖醇的应用和检测研究奠定一定的基础。
{"title":"Raman spectrum calculation and analysis of Xylitol","authors":"G. Mo-ran, Cai Hongxing, L. Liwei, Zhang Yue, Shi Jing, Hu Xinyue, Ma Zhenfang, Zhang Xihe","doi":"10.1109/3M-NANO.2012.6472993","DOIUrl":"https://doi.org/10.1109/3M-NANO.2012.6472993","url":null,"abstract":"Xylitol is an important substitute of sugar, it was widely used in medicine, chemical and food manufacture. In this work, xylitol geometry structure was optimized by density functional theory (DFT) method. Raman spectra was calculated based on Hartree-Fock (HF)/6-31G sets and DFT/6-31G sets, good agreements were obtained between the two theoretical and experimental results. Vibrational modes were assigned to all bands between 1000-3500cm-1 range. This work will establish a certain foundation to the study of the application and detection of xylitol.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128952731","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1