Analysis of GaAs FinFET Based Biosensor with Under Gate Cavity

Abstract

A 40 nm long channel FinFET-based biosensor has been demonstrated. A cavity is created to provide a biomolecule detecting surface. For immobilization, biomolecules are injected into cavities and nanocavities. Silvaco ATLAS device simulator tool has been used to examine the electrical properties of the device, including threshold voltage, transfer characteristics, switching ratio, subthreshold swing, and transconductance. Various biomolecules such as uricase, biotin, keratin are used for examining the sensitivity of the biosensor. The sensitivity of the biosensor is used to measure its detecting capacity. The likelihood of detecting biomolecules increases with increasing sensitivity. A biomolecule’s electrical properties are contrasted with the cavity’s empty space.