P. Janus, R. Dobrowolski, A. Sierakowski, F. Ivaldi, D. Szmigiel, J. Zajac
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Abstract
In this paper authors present design, technology and application of soft silicon dioxide AFM cantilevers. Novel technology allows for manufacturing ultra-soft cantilevers equipped with silicon tip. Mechanical properties of developed probes were tested and finally applied in AFM measurements of fragile samples.
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