Process Control by Means of Accelerated Testing

Joseph E. Brodeur
{"title":"Process Control by Means of Accelerated Testing","authors":"Joseph E. Brodeur","doi":"10.1109/IRPS.1975.362704","DOIUrl":null,"url":null,"abstract":"High temperature operating life test gives quick feedback on the processes used in fabrication of semiconductor wafers. The relatively high failure rate of the (so-called) freaks is quickly demonstrated in such a test and can indicate a marginal or out of control process. This method of process control concentrates on the initial fallout as a means of determining the reliability of final products. Greater than 150°C stress temperatures should not be applied to plastic encapsulated devices. Since most epoxies have glass transition temperatures in the range of 150°C to 180°C permanent damage to the package could result.","PeriodicalId":369161,"journal":{"name":"13th International Reliability Physics Symposium","volume":"354 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1975-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"13th International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1975.362704","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

Abstract

High temperature operating life test gives quick feedback on the processes used in fabrication of semiconductor wafers. The relatively high failure rate of the (so-called) freaks is quickly demonstrated in such a test and can indicate a marginal or out of control process. This method of process control concentrates on the initial fallout as a means of determining the reliability of final products. Greater than 150°C stress temperatures should not be applied to plastic encapsulated devices. Since most epoxies have glass transition temperatures in the range of 150°C to 180°C permanent damage to the package could result.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
加速试验方法的过程控制
高温工作寿命测试提供了半导体晶圆制造过程的快速反馈。在这样的测试中,相对较高的故障率(所谓的)畸形很快就会被证明,并且可以表明一个边缘或失控的过程。这种过程控制方法集中于初始沉降,作为确定最终产品可靠性的一种手段。大于150°C的应力温度不应应用于塑料封装的设备。由于大多数环氧树脂的玻璃化转变温度在150°C到180°C之间,可能会对封装造成永久性损坏。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
High Temperature Operating Tests (HTOT); A Control for Contaminated Microcircuit Processes Early Appreciation in Zinc-Diffused GaAs Electroluminescent Infrared Diodes Effects of Programming Variations on Nichrome Link PROMS Reliability Evaluation of Hermetic Integrated Circuit Chips in Plastic Packages Determination of Useful Life of Two-Layer Metallization Systems Via Accelerated Stressing
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1