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13th International Reliability Physics Symposium最新文献

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Process Control by Means of Accelerated Testing 加速试验方法的过程控制
Pub Date : 1975-04-01 DOI: 10.1109/IRPS.1975.362704
Joseph E. Brodeur
High temperature operating life test gives quick feedback on the processes used in fabrication of semiconductor wafers. The relatively high failure rate of the (so-called) freaks is quickly demonstrated in such a test and can indicate a marginal or out of control process. This method of process control concentrates on the initial fallout as a means of determining the reliability of final products. Greater than 150°C stress temperatures should not be applied to plastic encapsulated devices. Since most epoxies have glass transition temperatures in the range of 150°C to 180°C permanent damage to the package could result.
高温工作寿命测试提供了半导体晶圆制造过程的快速反馈。在这样的测试中,相对较高的故障率(所谓的)畸形很快就会被证明,并且可以表明一个边缘或失控的过程。这种过程控制方法集中于初始沉降,作为确定最终产品可靠性的一种手段。大于150°C的应力温度不应应用于塑料封装的设备。由于大多数环氧树脂的玻璃化转变温度在150°C到180°C之间,可能会对封装造成永久性损坏。
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引用次数: 1
Practical Applications of Accelerated Testing - Introduction 加速测试的实际应用-介绍
Pub Date : 1975-04-01 DOI: 10.1109/IRPS.1975.362703
D. Peck
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引用次数: 5
The Mechanisms of Current Induced Degradation in a GaAs Light Emitting Diode GaAs发光二极管中电流诱导降解的机理
Pub Date : 1975-04-01 DOI: 10.1109/IRPS.1975.362697
E. F. Thomas
The degradation of radiant power output (Po) for silicon doped GaAs infrared emitting diodes was established for dc current stress levels ranging from 70 to 175 A/cm2. Through an analysis of the forward I-V data and specially performed tests, it was de-termined that the initial degradation was due to increases in the space charge recom-bination current while later degradation was due to decreases in the diffusion current. The initial changes in the space charge recombination current were caused by the diffusion of zinc atoms to the junction region via the Longini mechanism. Zinc diffusion also resulted in an initial increase in Po both under stress and room temperature storage conditions. The mechan-ism responsible for the decrease in the diffusion current was not identified, but most probably involved the silicon dopant atoms.
在70 ~ 175 A/cm2的直流电流应力水平下,掺硅砷化镓红外发光二极管的辐射功率输出(Po)发生了衰减。通过对前向I-V数据的分析和专门进行的测试,确定了初始降解是由于空间电荷复合电流的增加,而后期降解是由于扩散电流的减少。空间电荷复合电流的初始变化是由锌原子通过Longini机制向结区扩散引起的。在应力和室温储存条件下,锌的扩散也导致了Po的初始增加。扩散电流减小的机制尚未确定,但很可能与硅掺杂原子有关。
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引用次数: 2
Effects of Intermetallics on the Reliability of Tin Coated Cu, Ag, and Ni Parts 金属间化合物对镀锡铜、银、镍零件可靠性的影响
Pub Date : 1975-04-01 DOI: 10.1109/IRPS.1975.362679
D. Olsen, R. Wright, H. Berg
The temperature dependence of the growth rates of intermetallic compounds in the Cu-Sn, Ag-Sn and Ni-Sn systems was determined between 100°C and 213°C for Sn-dipped and Sn-plated samples. Below 175°C the fastest growing intermetallic compound was Ag3Sn. The Ni-Sn compoknd, Ni3Sn, was the slowest growing phase below 150°C, but the fastest growing phase above 175°C. The two Cu-Sn intermetallic phases, Cu3Sn and Cu6Sn5, had a combined growth rate which increases more slowly with temperature than the single intermetallic phases observed in the Ni-Snand Ag-Sn systems. The growth rate data plotted against reciprocal temperature satisfies the Arrhenius relationship and yields a range of apparent activation energies between 14.8 Kcal/mole for Ag3Sn and 37.6 Kcal/mole for Ni3Sn4. The growth of intermetallic compounds can affect the reliability of electronic parts through a reduction in lead solderability or a decrease in the mechanical strength of soldered connections. Lap shear testing of metal strips bonded with Sn demonstrated that strengths of both bonded Ni and Cu strips decrease as the thickness of the intermetallic compounds increase during annealing at 213°C. In the case of Ni-Sn, a 50% reduction in joint strength occurred after only one day-at temperature. For Cu-Sn, the reduction in joint strength occurred at a slower rate, and only a slight decrease was observed in the Ag-Sn lap shear samples. The degradation observed in the Ni-Sn and Cu-Sn systems is related to the growth rate of brittle intermetallics forming at the interface (i.e. Ni3Sn4 and Cu3Sn).
测定了Cu-Sn、Ag-Sn和Ni-Sn体系中金属间化合物生长速率在100°C至213°C之间的温度依赖性。175℃以下生长最快的金属间化合物是Ag3Sn。Ni-Sn化合物Ni3Sn在150℃以下生长最慢,而在175℃以上生长最快。Cu-Sn两种金属间相Cu3Sn和Cu6Sn5的复合生长速率随温度的升高比Ni-Snand Ag-Sn体系中单个金属间相的生长速率慢。生长速率与温度的关系满足Arrhenius关系,得到Ag3Sn的表观活化能为14.8 Kcal/mol, Ni3Sn4的表观活化能为37.6 Kcal/mol。金属间化合物的生长可以通过降低铅的可焊性或降低焊接连接的机械强度来影响电子零件的可靠性。对锡键合金属带的搭接剪切测试表明,在213℃退火过程中,随着金属间化合物厚度的增加,Ni和Cu键合金属带的强度都有所降低。在Ni-Sn的情况下,仅在温度下一天后,接头强度就降低了50%。对于Cu-Sn,接头强度的降低速度较慢,Ag-Sn搭接剪切试样的接头强度仅略有下降。Ni-Sn和Cu-Sn体系的退化与界面处形成的脆性金属间化合物(即Ni3Sn4和Cu3Sn)的生长速度有关。
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引用次数: 23
Degradation Mechanisms in Rewritable N-Channel FAMOS Devices 可重写n通道FAMOS器件的退化机制
Pub Date : 1975-04-01 DOI: 10.1109/IRPS.1975.362669
R. Dockerty
Electrically rewritable n-channel FAMOS devices were fabricated with a floating polycrystalline silicon gate and an Al control gate. The Al gate is used to control injection of holes or electrons from the avalanching drain diffusion onto the floating gate. Charge retention by the floating gate and device degradation due to multiple write/erase cycling is discussed.
采用浮动多晶硅栅极和人工智能控制栅极制备了电可重写n沟道FAMOS器件。铝栅用于控制雪崩漏极扩散产生的空穴或电子注入浮栅。讨论了浮栅的电荷保留和多次写/擦除循环引起的器件退化。
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引用次数: 2
Width Dependence of Electromigration Life in Al-Cu Al-Cu-Si, and Ag Conductors Al-Cu- Al-Cu- si和Ag导体电迁移寿命的宽度依赖性
Pub Date : 1975-04-01 DOI: 10.1109/IRPS.1975.362689
G. A. Scoggan, B. Agarwala, P. Peressini, A. Brouillard
The electromigration lifetimes of thin-film Al-Cu, Al-Cu-Si, and Ag conductors were measured as a function of stripe width. Both the median lifetime and the standard deviation of the lognormal failure distribution were observed to depend strongly on the stripe width; this finding indicates that a narrower stripe is less reliable. This width dependence is interpreted in terms of the microstructural characteristics of the films.
测量了Al-Cu、Al-Cu- si和Ag薄膜导体的电迁移寿命与条纹宽度的关系。中位寿命和对数正态失效分布的标准偏差与条纹宽度密切相关;这一发现表明,较窄的条纹不太可靠。这种宽度依赖性是根据薄膜的微观结构特征来解释的。
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引用次数: 7
P-Channel Rewritable Avalanche Injection Device (RAID) Operation and Degradation Mechanisms p通道可重写雪崩注入装置(RAID)操作和退化机制
Pub Date : 1975-04-01 DOI: 10.1109/IRPS.1975.362668
S. Abbas, C. Barile
To implement an electrically rewritable device for Read Mostly Memory applications, the structure of the FAMOS device is modified by incorporating an additional metal gate on top of the floating polysilicon gate and separated from it by a specially grown thermal oxide. Electrical erasure is accomplished by applying a positive voltage pulse to the metal gate. The "write" voltage has been lowered by using ion implantation. Reliability and charge retention are discussed and their impact on the design of the device is assessed. An empirical model for the conduction of oxide between the floating gate and the metal gate is developed and results are projected and compared with data obtained on the device.
为了实现用于Read most Memory应用的电可重写器件,FAMOS器件的结构被修改,通过在浮动多晶硅栅极顶部合并额外的金属栅极,并通过特殊生长的热氧化物与之分离。电擦除是通过向金属栅极施加正电压脉冲来完成的。通过离子注入降低了写入电压。讨论了可靠性和电荷保留,并评估了它们对器件设计的影响。建立了氧化物在浮栅和金属栅之间导电的经验模型,并将结果与装置上得到的数据进行了投影和比较。
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引用次数: 4
SOS Island Edge Profiles Following Oxidation SOS岛边缘轮廓氧化后
Pub Date : 1975-04-01 DOI: 10.1109/IRPS.1975.362673
S. N. Lee, R. Kjar
A study of silicon and oxide profiles at the edges of silicon islands etched in silicon-on-sapphire (SOS) has shown that, following thermal oxidation of the silicon, a " V"- shaped groove forms between the silicon dioxide grown on the island edge and the sapphire substrate. This groove can cause etching and metal coverage anomalies at the island edges resulting in poor circuit yield and reliability.
对蓝宝石上硅(SOS)蚀刻硅岛边缘的硅和氧化物轮廓的研究表明,在硅的热氧化之后,在硅岛边缘生长的二氧化硅和蓝宝石衬底之间形成了一个“V”形沟槽。这种凹槽会导致岛状边缘的蚀刻和金属覆盖异常,从而导致电路良率和可靠性差。
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引用次数: 8
High Temperature Operating Tests (HTOT); A Control for Contaminated Microcircuit Processes 高温操作试验;污染微电路过程的控制
Pub Date : 1975-04-01 DOI: 10.1109/IRPS.1975.362706
Morton Stitch
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引用次数: 0
Multilevel Substrate Technology and Epoxy Component Attach for Hybrid Fabrication 多层基板技术和环氧复合材料复合制造
Pub Date : 1975-04-01 DOI: 10.1109/IRPS.1975.362699
R. F. Redemske
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引用次数: 0
期刊
13th International Reliability Physics Symposium
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