Milind S. Pandit, Chun Zhao, G. Sobreviela, Arif Mustafazade, X. Zou, A. Seshia
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引用次数: 18
Abstract
This paper reports on the experimental characterization of the resolution, sensitivity and common mode rejection metrics for a mode-localized MEMS accelerometer. A bias stability of 7μg is achieved for closed-loop amplitude ratio measurements at an integration time of 30s representing a significant advancement in the development of high-stability accelerometers employing this transduction principle.
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