Can We Use EDS to Determine Fluorine Contamination Level on A Normal Al Bondpad?

Abstract

IN this paper, the differences between EDS and AES are discussed. One can full understand what limitation of EDS technique is and why AES is better tool to determine F contamination on a normal Al bondpad. During application we cannot directly compare EDS result to AES result as EDS is a bulk analysis technique, while AES is surface analysis technique. For surface contamination analysis, a practice rule should be followed: “EDS clean is not clean” and “Auger clean is clean”. It is fully recommended for us to use AES to analyse and monitor surface F contamination level on a normal Al bondpad.