Subwavelength focusing and experimental detection of large-scale metallic multi-annular metasurfaces

Tong Wang, Tao Liu, Shuming Yang, Biyao Cheng, Qiang Liu, Kang Liu
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Abstract

To realize a long working distance and high resolution focusing for diffraction optical element, the large-scale optical elements need to be employed. Based on the vectorial angular spectrum theory and genetic algorithm, a large-scale metallic multi-annular metasurface (MAM) was designed. The MAM realizes subwavelength focusing and has a main focal spot within the range of 0–140 μm. The focal length is 113.5 μm. Using electron beam lithography, the designed MAM was fabricated. The experimental setup was built. The intensity distribution of the main focal spot was experimentally obtained. The theoretical and experimental results have a good agreement, which show that the proposed method can be used to design the large-scale MAM.
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大规模金属多环形超表面的亚波长聚焦与实验检测
为了实现衍射光学元件的长工作距离和高分辨率聚焦,需要采用大尺寸的光学元件。基于矢量角谱理论和遗传算法,设计了一种大型金属多环形超表面。MAM实现了亚波长聚焦,主焦斑在0 ~ 140 μm范围内。焦距为113.5 μm。利用电子束光刻技术制作了所设计的MAM。实验装置搭建完成。实验得到了主焦斑的强度分布。理论与实验结果吻合较好,表明该方法可用于大型MAM的设计。
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