Determination of the eigenstates and wavefunctions of a single gated As donor

G. Lansbergen, R. Rahman, C. Wellard, P. Rutten, J. Caro, I. Woo, N. Colleart, S. Biesemans, Gerhard Klimeck, L. Hollenberg, S. Rogge
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Abstract

Current semiconductor devices have been scaled to such dimensions that we need take atomistic approach to understand their operation for nano-electronics. From a bottoms-up perspective, the smallest functional element within a nanodevice would be a single (dopant) atom itself. Control and understanding over the eigenenergies and wavefunctions of a single dopant could prove a key ingredient for device technology beyond-CMOS. Here, we will discuss the eigenlevels of a single As donor in a three terminal configuration. The donor is incorporated in the channel of prototype transistors called FinFETs. The measured eigenlevels are shown to consist of levels associated with the donors Coulomb potential, levels associated with a triangular well at the gate interface and hybridized combinations of the two. The theoretical framework in which we describe this system (NEMO-3D) is based on a tight-binding approximation.
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单门控砷供体本征态和波函数的确定
目前的半导体器件已经达到了一定的尺寸,我们需要用原子的方法来理解它们在纳米电子学中的操作。从自下而上的角度来看,纳米器件中最小的功能元素将是单个(掺杂)原子本身。控制和理解单个掺杂剂的特征能量和波函数可以证明是超越cmos的器件技术的关键因素。在这里,我们将讨论在三端构型中单个As供体的本征能级。供体集成在称为finfet的原型晶体管的通道中。测量的特征能级由供体库仑势相关的能级、栅极界面处三角形阱相关的能级和两者的杂化组合组成。我们描述该系统(NEMO-3D)的理论框架是基于紧密结合近似的。
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