Thermal stability evaluation of sheathed platinum resistance sensor based on nitride nano-coating

Rongbing Zhao, Wenzhi Luo, An Zhou, Zhi Jiang
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Abstract

The strong wear-resistant application environment requires the temperature sensor to be flexible, durable, high-precision, and good long-term stability. The sheathed platinum thermistor sensor with nitride nano coating prepared by magnetron sputtering is selected. First, in order to improve the effectiveness and accuracy of the thermal stability observation data of platinum resistance sensor, the stability and reliability of the observation equipment are evaluated; through analysis, it is determined that the main factors affecting the uncertainty of platinum resistance temperature sensor are measurement repeatability, the stability and uncertainty of standard thermometer, the resolution of the thermometer to be tested, and the non-uniformity of the calibration bath temperature, etc., and an evaluation model for the reliability of the calibration results of platinum resistance temperature sensor is established. Then, by selecting the resistance value of the sheathed platinum thermal resistance sensor under the water three-phase point as the stability comparison benchmark, a high-precision test evaluation system is designed, which is not greater than 3mK. Finally, the high temperature electrical life test, temperature shock test and natural storage test were carried out for the sheathed platinum resistance sensor, and the long-term thermal stability of the sheathed platinum resistance sensor based on the nitride nano coating was evaluated to reach 8mK, meeting the requirements of international regulations for platinum resistance.
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氮化纳米涂层护套铂电阻传感器热稳定性评价
强耐磨的应用环境要求温度传感器具有灵活、耐用、高精度和良好的长期稳定性。选择了磁控溅射法制备的氮化纳米涂层护套铂热敏电阻传感器。首先,为了提高铂电阻传感器热稳定性观测数据的有效性和准确性,对观测设备的稳定性和可靠性进行了评估;通过分析,确定了影响铂电阻温度传感器不确定度的主要因素有测量重复性、标准温度计的稳定性和不确定度、待测温度计的分辨率、校准液温度的不均匀性等,并建立了铂电阻温度传感器校准结果可靠性的评价模型。然后,选取护套铂热阻传感器在水三相点下的电阻值作为稳定性比较基准,设计了不大于3mK的高精度测试评价系统。最后,对护套铂电阻传感器进行了高温电寿命试验、温度冲击试验和自然贮存试验,评价了基于氮化纳米涂层的护套铂电阻传感器的长期热稳定性达到8mK,满足国际铂电阻法规的要求。
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