M. Yoshizawa, Seisei Oyamada, A. Hattori, T. Nakura, K. Asada
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引用次数: 4
Abstract
In this paper, we demonstrate our STO thin film decoupling capacitor embedded in organic interposer is effective for reduction of resonant power supply noise of LSI. By comparison of Shmoo plots with on-chip MOS capacitor, significant contributions of STO capacitor to higher operable frequency and lower power supply voltage are shown.
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