Electrical and structural characterization of Zn doped CuGaO2 films

A. Alias, K. A. Mohamad, K. Uesugi, H. Fukuda
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Abstract

Oxide materials have been widely used in opto-electro devices due to their wide bandgap energy, high optical transparency in the visible light region, and wide range resistance. Recently, delafossite CuMO2 (M=Al, Ga, In) have been widely studied for p-type oxide semiconductors. In this study, CuGaO2 was chosen due to its smaller lattice mismatch with ZnO compared with CuAlO2 for the possibility of p-n junction device in the future work. Zn as impurity atoms was introduced to fabricate quaternary CuZnGaO2 films to reduce lattice mismatch with ZnO. In order to study the effect of the substitute site of the Zn ion for generating donor or acceptor, 3 methods of preparation of the Cu-Zn-Ga-O sol solution were also demonstrated. In this paper, the electrical and structural properties of Zn doped on the sol-gel derived CuGaO2 films have been investigated. The diffraction angle of the CuGaO2 films are shifted to lower angle with increasing Zn%, indicating the lattice expansion which proved that the introducing Zn as impurity atoms was able to reduce lattice mismatch between CuGaO2 and ZnO. While the curve in the negative gate bias Vg proved the hole dominated transport properties. The curve in the positive gate bias can be suppressed by introducing Zn.
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锌掺杂CuGaO2薄膜的电学和结构表征
氧化物材料因其能隙宽、可见光区透明性高、抗范围宽等优点,在光电器件中得到了广泛的应用。近年来,delafoite CuMO2 (M=Al, Ga, In)作为p型氧化物半导体材料得到了广泛的研究。在本研究中,由于CuGaO2与ZnO的晶格失配比CuAlO2小,因此选择CuGaO2作为未来工作中p-n结器件的可能性。将Zn作为杂质原子引入到CuZnGaO2薄膜中,以减少与ZnO的晶格失配。为了研究Zn离子的取代位对生成供体或受体的影响,还演示了3种制备Cu-Zn-Ga-O溶胶溶液的方法。本文研究了锌掺杂在CuGaO2溶胶-凝胶薄膜上的电学和结构性质。随着Zn%的增加,CuGaO2薄膜的衍射角向低角度移动,表明薄膜的晶格扩展,这表明引入Zn作为杂质原子能够减少CuGaO2与ZnO之间的晶格失配。而负栅偏置的曲线则证明了空穴主导的输运性质。引入Zn可以抑制正栅极偏置曲线。
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