A Prototype Femtosecond Laser System for Precise Micromachining

K. Garasz, M. Kocik, R. Barbucha, M. Tański, J. Mizeraczyk, M. Nejbauer, C. Radzewicz
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Abstract

In this article we present a concept of a prototype design of the femtosecond laser micromachining system and a femtosecond solid-state Yb:KYW laser developed in our laboratory. Ultra-short laser pulses have many advantages over the long pulses laser micromachining, due to their unique ability to interact with different materials without transferring heat to them. This allows very precise and pure laser-processing, clean cuts and sharp edges. A femtosecond laser micromachining device presented here is equipped with a synchronized motion control system. Application of this advanced motion system results in the maximum use of the femtosecond laser potential for high-precision micromachining.
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用于精密微加工的飞秒激光系统原型
在本文中,我们提出了飞秒激光微加工系统的原型设计概念和我们实验室开发的飞秒固态Yb:KYW激光器。超短激光脉冲具有与不同材料相互作用而不传递热量的独特能力,与长脉冲激光微加工相比具有许多优点。这允许非常精确和纯粹的激光加工,干净的切割和锋利的边缘。本文提出了一种飞秒激光微加工装置,该装置配备了同步运动控制系统。应用这种先进的运动系统可以最大限度地利用飞秒激光的潜力进行高精度的微加工。
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