{"title":"Electrical characteristics in a low pressure ferrite-free inductively coupled discharge","authors":"Yuming Chen, Yang Liu","doi":"10.1109/IECON.2011.6119616","DOIUrl":null,"url":null,"abstract":"The electrical parameters of a low pressure ferrite-free inductively coupled discharge have been investigated. In the experiment plasma can be considered as a one-turn secondary load of an air-core transformer. The electrical conductivity ratio between the image part and the real part σi/σr can be obtained through calculating Maxwell equations. The electrical characteristics can be obtained by the calculation of the equivalent circuit.","PeriodicalId":105539,"journal":{"name":"IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society","volume":"152 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IECON.2011.6119616","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
The electrical parameters of a low pressure ferrite-free inductively coupled discharge have been investigated. In the experiment plasma can be considered as a one-turn secondary load of an air-core transformer. The electrical conductivity ratio between the image part and the real part σi/σr can be obtained through calculating Maxwell equations. The electrical characteristics can be obtained by the calculation of the equivalent circuit.
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