L. Doyen, X. Federspiel, D. Ney, G. Sers, L. Arnaud, Y. Wouters
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引用次数: 4
Abstract
Taking into account Matthiessen's rules, we have developed a model of residual resistivity with line dimensions. The method developed allows distinguishing the effect of impurities and the sizing effect. Thus we are able to determine line dimensions consistent with process variation. Finally this model allows an appreciable evaluation of the TCR
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