K. Akahane, N. Yamamoto, S. Gozu, A. Ueta, M. Tsuchiya
{"title":"Fabrication of High Quality AlGaSb/AlSb-distributed Bragg Reflectors on Si","authors":"K. Akahane, N. Yamamoto, S. Gozu, A. Ueta, M. Tsuchiya","doi":"10.1109/GROUP4.2006.1708176","DOIUrl":null,"url":null,"abstract":"We fabricated AlGaSb/AlSb-distributed Bragg reflectors (DBRs) on Si(001) substrates. The use of an AlSb initiation layer enabled us to fabricate high-quality AlGaSb/AlSb films on the Si substrates. A well-defined AlGaSb/AlSb-DBR structure was observed using a scanning electron microscope. A stop band of 100 nm centered at 1500 nm was observed using a Fourier transform infrared spectrometer","PeriodicalId":342599,"journal":{"name":"3rd IEEE International Conference on Group IV Photonics, 2006.","volume":"116 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"3rd IEEE International Conference on Group IV Photonics, 2006.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GROUP4.2006.1708176","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We fabricated AlGaSb/AlSb-distributed Bragg reflectors (DBRs) on Si(001) substrates. The use of an AlSb initiation layer enabled us to fabricate high-quality AlGaSb/AlSb films on the Si substrates. A well-defined AlGaSb/AlSb-DBR structure was observed using a scanning electron microscope. A stop band of 100 nm centered at 1500 nm was observed using a Fourier transform infrared spectrometer