Model predictive control of Czochralski crystal growth process

James Ng, S. Dubljevic, I. Aksikas
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Abstract

This paper presents a model predictive control (MPC) formulation for the Czochralski (CZ) crystal growth which is given by the discrete finite-dimensional system representation of a class of parabolic partial differential equations (PDEs) with time-varying features. The motivation behind this work is to address the problem of stabilizing, infinite horizon, linear quadratic regulator synthesis for PDEs with time-dependent parameters which affect the dynamics of the underlying system and appear in the state-space representation. The modal decomposition of the PDE facilitates its approximation by a finite-dimensional linear state-space system. A receding horizon regulator is proposed which incorporates the time-dependence of the PDE parameters and numerical simulations are carried out which demonstrate the optimal stabilization of the process under state and input constraints.
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克氏晶体生长过程的模型预测控制
本文用一类具有时变特征的抛物型偏微分方程的有限维离散系统表示给出了CZ晶体生长的模型预测控制(MPC)公式。这项工作背后的动机是解决具有时间相关参数的偏微分方程的稳定,无限视界,线性二次调节器综合问题,这些参数影响底层系统的动力学并出现在状态空间表示中。模态分解有助于用有限维线性状态空间系统逼近偏微分方程。提出了一种考虑PDE参数时变特性的后退水平调节器,并进行了数值仿真,验证了在状态约束和输入约束下该过程的最优镇定性。
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