Metal reduction at point-of-use filtration

T. Umeda, S. Daikoku, R. Varanasi, S. Tsuzuki
{"title":"Metal reduction at point-of-use filtration","authors":"T. Umeda, S. Daikoku, R. Varanasi, S. Tsuzuki","doi":"10.1117/12.2218400","DOIUrl":null,"url":null,"abstract":"We explored the metal removal efficiency of Nylon 6,6 and HDPE (High Density Polyethylene) membrane based filters, in solvents of varying degree of polarity such as Cyclohexanone and 70:30 mixture of PGME (Propylene Glycol Monomethyl Ether) and PGMEA (Propylene Glycol Monomethyl Ether), In all the solvents tested, Nylon 6,6 membrane filtration was found to be significantly more effective in removing metals than HDPE membranes, regardless of their respective membrane pore sizes. Hydrophilic interaction chromatography (HILIC) mechanism was invoked to rationalize metal removal efficiency dependence on solvent hydrophobicity.","PeriodicalId":193904,"journal":{"name":"SPIE Advanced Lithography","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE Advanced Lithography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2218400","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

Abstract

We explored the metal removal efficiency of Nylon 6,6 and HDPE (High Density Polyethylene) membrane based filters, in solvents of varying degree of polarity such as Cyclohexanone and 70:30 mixture of PGME (Propylene Glycol Monomethyl Ether) and PGMEA (Propylene Glycol Monomethyl Ether), In all the solvents tested, Nylon 6,6 membrane filtration was found to be significantly more effective in removing metals than HDPE membranes, regardless of their respective membrane pore sizes. Hydrophilic interaction chromatography (HILIC) mechanism was invoked to rationalize metal removal efficiency dependence on solvent hydrophobicity.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
过滤时的金属还原
我们探索了尼龙6,6和HDPE(高密度聚乙烯)膜过滤器在不同极性溶剂中的金属去除效率,如环己酮和70:30的PGME(丙二醇单甲醚)和PGMEA(丙二醇单甲醚)混合物。在所有测试的溶剂中,尼龙6,6膜过滤在去除金属方面明显比HDPE膜更有效,无论它们各自的膜孔径大小如何。采用亲水性相互作用色谱(HILIC)机制来解释溶剂疏水性对金属去除效率的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
SEM based overlay measurement between resist and buried patterns Contrast optimization for 0.33NA EUV lithography Analysis of wafer heating in 14nm DUV layers GPU accelerated Monte-Carlo simulation of SEM images for metrology Lensless hyperspectral spectromicroscopy with a tabletop extreme-ultraviolet source
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1