A novel equivalent circuit and parameter extraction for on-chip spiral inductors

Abstract

In this paper, we present a wide-band inductor model that contains lateral substrate resistance and capacitance. In order to model the non-linear features of substrate characteristic functions, we add a novel substrate parasitic inductance to the model. The extraction is carried out using a set of characteristic functions derived from equivalent circuit without iterative optimization. As verified by a series of inductors fabricated with a 0.18 um CMOS process, the model accurately predicts the equivalent series resistance and inductance over a wide frequency range.