{"title":"Measure Thickness of Magnetic Thin-Film Based on the Capacitance-to-frequency Signal Conversion","authors":"Liu Changhui, Chen Yanli, Guo Xv, Zhang Yanduo","doi":"10.1109/ICICIS.2011.98","DOIUrl":null,"url":null,"abstract":"According to wave-absorbing material's electricity characteristic, this text created a kind of new high-performance, low-cost capacitance type absorbing-wave coat's thickness measuring system. Carry out a research of thin film measurement which from nm-level to micron-level. According to the theory which capacitor working in electric field, it design a special single-piece capacitance sensor. This system can carry on a measurement to the thickness of thin film from nm-level to micron-level. The use of capacitance / frequency (C / F) method, the system can automatically tune to zero, calibrate and eliminate most of the error, so the system structure is very simple.","PeriodicalId":255291,"journal":{"name":"2011 International Conference on Internet Computing and Information Services","volume":"86 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 International Conference on Internet Computing and Information Services","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICICIS.2011.98","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
According to wave-absorbing material's electricity characteristic, this text created a kind of new high-performance, low-cost capacitance type absorbing-wave coat's thickness measuring system. Carry out a research of thin film measurement which from nm-level to micron-level. According to the theory which capacitor working in electric field, it design a special single-piece capacitance sensor. This system can carry on a measurement to the thickness of thin film from nm-level to micron-level. The use of capacitance / frequency (C / F) method, the system can automatically tune to zero, calibrate and eliminate most of the error, so the system structure is very simple.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
