Design on latchup-free power-rail ESD clamp circuit in high-voltage CMOS ICs

Kun-Hsien Lin, M. Ker
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引用次数: 15

Abstract

The holding voltage of the high-voltage ESD protection devices in snapback breakdown condition has been found to be much smaller than the power supply voltage. Such characteristics will cause the high-voltage CMOS ICs susceptible to the latchup-like danger in the real system applications, especially while these devices are used in the power-rail ESD clamp circuit. A new latchup-free design on the power-rail ESD clamp circuit with stacked-field-oxide structure is proposed and successfully verified in a 0.25-mum 40-V CMOS process to achieve the desired ESD level. The total holding voltage of the stacked-field-oxide structure in snapback breakdown condition can be larger than the power supply voltage. Therefore, latchup or latchup-like issues can be avoided by stacked-field-oxide structures for the IC applications with VDD of 40 V.
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高压CMOS集成电路中无锁存器电源轨ESD钳位电路的设计
研究发现,在回跳击穿条件下,高压ESD保护器件的保持电压远小于电源电压。在实际系统应用中,特别是在电源轨ESD钳位电路中使用时,这种特性会导致高压CMOS ic容易产生类似锁存器的危险。提出了一种新的无锁存的电源轨ESD箝位电路设计,采用堆叠场氧化物结构,并在0.25-mum 40-V CMOS工艺中成功验证,达到了期望的ESD水平。在回跳击穿条件下,叠加场氧化物结构的总保持电压可以大于电源电压。因此,对于VDD为40 V的IC应用,堆叠场氧化物结构可以避免锁存或类似锁存的问题。
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