Enes Calayir, S. Merugu, Jaewung Lee, Navab Singh, G. Piazza
{"title":"Heterogeneously Integrated Aluminum Nitride\n MEMS\n Resonators and Filters","authors":"Enes Calayir, S. Merugu, Jaewung Lee, Navab Singh, G. Piazza","doi":"10.1002/9783527823239.ch7","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":436477,"journal":{"name":"3D and Circuit Integration of MEMS","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"3D and Circuit Integration of MEMS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/9783527823239.ch7","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}