Ya-Lan Zhao, Bin Yang, Jingquan Liu, Xiang Chen, Xiaolin Wang, Chunsheng Yang
{"title":"An ultrasensitive humidity sensor based on SnO2-modified MoS2 nanocomposite at low-humidity range","authors":"Ya-Lan Zhao, Bin Yang, Jingquan Liu, Xiang Chen, Xiaolin Wang, Chunsheng Yang","doi":"10.1109/MEMSYS.2018.8346705","DOIUrl":null,"url":null,"abstract":"This paper reports an ultrasensitive capacitive humidity sensor for low-humidity detecting environment, which employs SnO2-modified MoS2 (SnO2/MoS2) hybrid nanocomposite film as sensing layer and interdigital electrodes with narrow gap of 15 μm on sapphire substrate. The testing results show that the sensor of SnO2/MoS2 (10: 1) composite has the best sensitivity of 387.5 μF/%RH at the humidity range of 0–20% relative humidity (RH). To our best knowledge, this sensitivity value is higher than that of all reported humidity sensors at low-humidity range. Moreover, the humidity sensor also has fast response (15s), little hysteresis and good repeatability.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"62 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2018.8346705","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper reports an ultrasensitive capacitive humidity sensor for low-humidity detecting environment, which employs SnO2-modified MoS2 (SnO2/MoS2) hybrid nanocomposite film as sensing layer and interdigital electrodes with narrow gap of 15 μm on sapphire substrate. The testing results show that the sensor of SnO2/MoS2 (10: 1) composite has the best sensitivity of 387.5 μF/%RH at the humidity range of 0–20% relative humidity (RH). To our best knowledge, this sensitivity value is higher than that of all reported humidity sensors at low-humidity range. Moreover, the humidity sensor also has fast response (15s), little hysteresis and good repeatability.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
