{"title":"Properties of transparent organic-inorganic composite coatings prepared by ion beam sputtering of PTFE and Al2O3","authors":"M. Gauch, H. Ehlers, D. Ristau","doi":"10.1117/12.2191067","DOIUrl":null,"url":null,"abstract":"Composite organic-inorganic coatings are realized by ion beam sputtering (IBS) from a zone target consisting of PTFE and Al2O3. The composition of the sputtered coatings is measured by Energy-Dispersive X-ray spectroscopy and the molecular structure is analyzed by Fourier Transform Infrared spectroscopy. The variation of the refractive index and the optical quality in dependence of the carbon-fluorine content for different material compositions is investigated. Furthermore, the intrinsic stress of the coatings is analyzed and a change from compressive to tensile stress in dependence of the composition is observed. The production of ion beam sputtered composite coatings with low refractive index and tensile stress is demonstrated.","PeriodicalId":212434,"journal":{"name":"SPIE Optical Systems Design","volume":"71 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE Optical Systems Design","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2191067","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Composite organic-inorganic coatings are realized by ion beam sputtering (IBS) from a zone target consisting of PTFE and Al2O3. The composition of the sputtered coatings is measured by Energy-Dispersive X-ray spectroscopy and the molecular structure is analyzed by Fourier Transform Infrared spectroscopy. The variation of the refractive index and the optical quality in dependence of the carbon-fluorine content for different material compositions is investigated. Furthermore, the intrinsic stress of the coatings is analyzed and a change from compressive to tensile stress in dependence of the composition is observed. The production of ion beam sputtered composite coatings with low refractive index and tensile stress is demonstrated.
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