Investigation of longitudinal leaky surface acoustic waves by scanning acoustic force microscopy

G. Behme, E. Chilla, H.-J. Frohlich
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引用次数: 1

Abstract

We present first measurements on acoustic waves with quasi longitudinal polarization on quartz and lithium tantalate substrates as well as layered systems carried out by a scanning acoustic force microscope (SAFM). Acoustic phase velocities were measured for microscopic areas showing a good agreement with numerical calculations. The influence of the penetration depth of the high velocity pseudo SAWs (HVPSAW) on the SAFM signal formation is discussed.
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扫描声力显微镜研究纵向泄漏表面声波
我们首次采用扫描声力显微镜(SAFM)对石英和钽酸锂衬底以及分层系统上的准纵向极化声波进行了测量。对微观区域的声相速度进行了测量,结果与数值计算结果吻合较好。讨论了高速伪saw (HVPSAW)侵彻深度对SAFM信号形成的影响。
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