R. Oliveri, A. Sciuto, S. Libertino, G. D'Arrigo, C. Arnone
{"title":"Fabrication and characterization of polymeric optical waveguides using standard silicon processing technology","authors":"R. Oliveri, A. Sciuto, S. Libertino, G. D'Arrigo, C. Arnone","doi":"10.1109/WFOPC.2005.1462137","DOIUrl":null,"url":null,"abstract":"We report the fabrication and characterization of a rib polymeric waveguide having a thick layer of oxidized porous silicon as an innovative solution for the lower cladding. The waveguide was fabricated using standard silicon substrates and Si-based technology. The multimodal guiding structure has a polymethylmetacrylate (PMMA) core and the innovative lower cladding was obtained by thermal oxidation of a porous silicon layer. The waveguide does not have the upper cladding. Propagation loss measurements were performed at 1.48 /spl mu/m using the cut-back method. We obtained propagation loss of about 1.7 dB/cm, confirming the possibility to use the porous silicon oxide as the lower cladding layer, for low cost waveguide applications.","PeriodicalId":445290,"journal":{"name":"Proceedings of 2005 IEEE/LEOS Workshop on Fibres and Optical Passive Components, 2005.","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2005-06-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 2005 IEEE/LEOS Workshop on Fibres and Optical Passive Components, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/WFOPC.2005.1462137","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
We report the fabrication and characterization of a rib polymeric waveguide having a thick layer of oxidized porous silicon as an innovative solution for the lower cladding. The waveguide was fabricated using standard silicon substrates and Si-based technology. The multimodal guiding structure has a polymethylmetacrylate (PMMA) core and the innovative lower cladding was obtained by thermal oxidation of a porous silicon layer. The waveguide does not have the upper cladding. Propagation loss measurements were performed at 1.48 /spl mu/m using the cut-back method. We obtained propagation loss of about 1.7 dB/cm, confirming the possibility to use the porous silicon oxide as the lower cladding layer, for low cost waveguide applications.