H. Funke, M. Raynor, V. Houlding, T. Ramus, S. Hein, R. Kirk
{"title":"Trace moisture detection in corrosive gases using quadrupole mass spectroscopy","authors":"H. Funke, M. Raynor, V. Houlding, T. Ramus, S. Hein, R. Kirk","doi":"10.1109/LEOSST.2000.869711","DOIUrl":null,"url":null,"abstract":"An online analyzer for impurities in corrosive gases was developed using an HP-5973 MSD quadrupole mass selective detector equipped with customized data acquisition and gas sample inlet. The instrument was evaluated for its ability to quantitatively analyze moisture and other impurities at the ppm level in HCl.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"66 1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LEOSST.2000.869711","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
An online analyzer for impurities in corrosive gases was developed using an HP-5973 MSD quadrupole mass selective detector equipped with customized data acquisition and gas sample inlet. The instrument was evaluated for its ability to quantitatively analyze moisture and other impurities at the ppm level in HCl.
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