On-wafer wideband characterization of advanced MOS technologies

J. Raskin
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Abstract

A full frequency band analysis is precious for separating physical phenomena taking place in MOS devices. Based on the extraction of a wideband equivalent small-signal circuit, various MOS technologies can be fairly compared and compact models with increase validity domain can be established. The extracted values for the various parameters constituting the electrical equivalent circuit of a particular device are useful not only for integrated circuit designers but also for the engineers at the early stage of the technology development. In this paper, the wideband characterization of several advanced MOS transistors is presented and discussed
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先进MOS技术的片上宽带特性
全频带分析对于分离MOS器件中发生的物理现象是非常宝贵的。在提取宽带等效小信号电路的基础上,可以对各种MOS技术进行比较,建立有效域增大的紧凑模型。所提取的构成特定器件等效电路的各种参数的值不仅对集成电路设计人员有用,而且对处于技术发展早期阶段的工程师也很有用。本文介绍并讨论了几种先进MOS晶体管的宽带特性
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