S. Kundu, S. Ogawa, S. Kumagai, M. Fujishima, K. Hane, M. Sasaki
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引用次数: 0
Abstract
The tense polycrystalline (poly-) Si torsion bar micromirror is advantageous to realize large rotation angle and stabilized temperature characteristics, simultaneously. In this paper, the hard spring effect of tense poly-Si torsion bar is characterized.
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