Michael F. Benisch, O. Fähnle, R. Rascher, W. Bogner
{"title":"Force and pressure analysis during overarm polishing","authors":"Michael F. Benisch, O. Fähnle, R. Rascher, W. Bogner","doi":"10.1117/12.2564903","DOIUrl":null,"url":null,"abstract":"The Preston-equation implies, that, besides the relative speed υrel and a specific constant KP, the pressure p plays a significant role for the removal rate when polishing an optical component. This paper demonstrates a possibility for a qualitative evaluation of the pressure distribution before the polishing process. A pressure-sensitive foil is used as a gauge for pressure measurement. The effectiveness of this measuring method is explained. Specific weaknesses and limitations in the use of these foils are discussed. A method for an integrated evaluation of the pressure on different spots of the polishing pad is proposed at the end of the paper.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Optics Manufacturing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2564903","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The Preston-equation implies, that, besides the relative speed υrel and a specific constant KP, the pressure p plays a significant role for the removal rate when polishing an optical component. This paper demonstrates a possibility for a qualitative evaluation of the pressure distribution before the polishing process. A pressure-sensitive foil is used as a gauge for pressure measurement. The effectiveness of this measuring method is explained. Specific weaknesses and limitations in the use of these foils are discussed. A method for an integrated evaluation of the pressure on different spots of the polishing pad is proposed at the end of the paper.
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