Broadband CPW multilayer directional couplers on GaAs for MMIC applications

L. Krishnamurthy, V. T. Vo, R. Sloan, K. Williams, A. Rezazadeh
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引用次数: 12

Abstract

This paper describes the design and characterisation of wide band multilayer directional couplers, fabricated on GaAs semi-insulating substrates with two conductive layers of gold separated by polyimide as a dielectric layer, operating at a centre frequency of 24 GHz. These components are very useful in the construction of multilayer MMICs and are compact and easy to design employing multilayer technology. High frequency simulations were carried out using Agilent's Advanced Design System (ADS). In the design iteration, the thickness of the dielectric layer was varied to optimize the coupling and the isolation factors. The effects of metal overlap to improve the isolation factor of the directional couplers have been investigated in full. In this work, on-wafer RF measurements were carried out on the fabricated directional couplers using a HP85107A network analyser. Directional couplers with 90/spl deg/ phase angle, coupling factor of 5 dB and isolation of 10 dB were achieved over the 10 to 35 GHz frequency band. We further compare the results of simulations with those of measured data for final design optimisations.
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用于MMIC应用的GaAs宽带CPW多层定向耦合器
本文描述了一种宽带多层定向耦合器的设计和特性,该耦合器是在GaAs半绝缘衬底上制成的,两层导电金被聚酰亚胺作为介电层隔开,工作在24 GHz的中心频率下。这些组件在多层mmic的构建中非常有用,并且采用多层技术设计紧凑且易于设计。高频仿真使用安捷伦的先进设计系统(ADS)进行。在设计迭代中,通过改变介质层厚度来优化耦合和隔离系数。研究了金属重叠对提高定向耦合器隔离系数的影响。在这项工作中,使用HP85107A网络分析仪对制造的定向耦合器进行了晶圆上射频测量。在10 ~ 35 GHz频段内实现了90/声压角/相位角、5 dB耦合系数和10 dB隔离度的定向耦合器。我们进一步将模拟结果与最终设计优化的测量数据进行比较。
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